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Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern. - 2nd ed. - Norwich, NY : William Andrew, c2008. - xxvi, 718 p. : il. ; 24 cm. - Materials science & process technology series . - Materials science and process technology series. .

Incluye referencias biliográficas e índice.

ISBN: 9780815515548 0815515545

Subjects--Topical Terms:
Tecnología de silicio sobre aislante.
Silicon-on-insulator technology.

LC Class. No.: TK7871.85 / H35 2008