Fabrication engineering at the micro and nanoscale /
Campbell, Stephen A., 1954-
Fabrication engineering at the micro and nanoscale / Stephen A. Campbell. - 4th ed. - New York : Oxford University Press, 2013. - xiv, 671 p. : il. ; 23 cm. - The Oxford series in electrical and computer engineering . - Oxford series in electrical and computer engineering. .
Incluye referencias bibliográficas e índice.
9780199861224
Semiconductores--Diseño y construcción.
Semiconductors--Design and construction.
TK7871.85 / C356 2013 TK7871.85 / C35 2013
Fabrication engineering at the micro and nanoscale / Stephen A. Campbell. - 4th ed. - New York : Oxford University Press, 2013. - xiv, 671 p. : il. ; 23 cm. - The Oxford series in electrical and computer engineering . - Oxford series in electrical and computer engineering. .
Incluye referencias bibliográficas e índice.
9780199861224
Semiconductores--Diseño y construcción.
Semiconductors--Design and construction.
TK7871.85 / C356 2013 TK7871.85 / C35 2013
