MARC details
| 000 -LÍDER |
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| fixed length control field |
03415cam a2200565Ki 4500 |
| 001 - NÚMERO DE CONTROL |
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| control field |
u380159 |
| 003 - IDENTIFICADOR DEL NÚMERO DE CONTROL |
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| control field |
SIRSI |
| 005 - FECHA Y HORA DE LA ULTIMA TRANSACCIÓN |
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| control field |
20160812084633.0 |
| 006 - ELEMENTOS DE LONGITUD FIJA - CARACTERÍSTICAS DE MATERIALES ADICIONALES - INFORMACIÓN GENERAL |
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| fixed length control field |
m o d |
| 007 - CAMPO FIJO DE DESCRIPCIÓN FIJA--INFORMACIÓN GENERAL |
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| fixed length control field |
cr cnu---unuuu |
| 008 - ELEMENTOS DE LONGITUD FIJA -- INFORMACIÓN GENERAL |
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| fixed length control field |
131112s2011 nyu o 000 0 eng d |
| 040 ## - FUENTE DE CATALOGACIÓN |
|---|
| Original cataloging agency |
OPELS |
| Language of cataloging |
eng |
| Description conventions |
rda |
| -- |
pn |
| Transcribing agency |
OPELS |
| Modifying agency |
NT |
| -- |
YDXCP |
| -- |
UIU |
| -- |
IDEBK |
| -- |
MHW |
| -- |
EBLCP |
| 019 ## - |
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| -- |
863039988 |
| -- |
863158166 |
| -- |
863203964 |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
9780080947716 (electronic bk.) |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
0080947719 (electronic bk.) |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| Canceled/invalid ISBN |
9780815515937 |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| Canceled/invalid ISBN |
0815515936 |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
9780815519874 (electronic bk.) |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
0815519877 (electronic bk.) |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
1306119952 (ebk) |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
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| International Standard Book Number |
9781306119955 (ebk) |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) |
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| OCLC library identifier |
NLGGC |
| System control number |
370307356 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) |
|---|
| OCLC library identifier |
NZ1 |
| System control number |
15295455 |
| 029 1# - OTHER SYSTEM CONTROL NUMBER (OCLC) |
|---|
| OCLC library identifier |
DEBSZ |
| System control number |
405351887 |
| 050 #4 - SIGNATURA TOPOGRÁFICA DE LA BIBLIOTECA DEL CONGRESO |
|---|
| Classification number |
TK7874 |
| 082 04 - NÚMERO DE CLASIFICACIÓN DECIMAL DEWEY |
|---|
| Classification number |
621.381 |
| Edition number |
22 |
| 049 ## - LOCAL HOLDINGS (OCLC) |
|---|
| Holding library |
TEFA |
| 100 1# - ASIENTO PRINCIPAL--NOMBRE PERSONAL |
|---|
| Personal name |
Sarkar, Jaydeep, |
| Relator term |
author. |
| 245 10 - MENCIÓN DE TITULO |
|---|
| Title |
Sputtering materials for VLSI and thin film devices |
| Medium |
[recurso electrónico] / |
| Statement of responsibility, etc. |
Jaydeep Sarkar. |
| 264 #1 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Norwich, N.Y. : |
| Name of producer, publisher, distributor, manufacturer |
William Andrew, |
| Date of production, publication, distribution, manufacture, or copyright notice |
2011. |
| 264 #2 - PRODUCTION, PUBLICATION, DISTRIBUTION, MANUFACTURE, AND COPYRIGHT NOTICE |
|---|
| Place of production, publication, distribution, manufacture |
Oxford : |
| Name of producer, publisher, distributor, manufacturer |
Elsevier Science [distributor] |
| 300 ## - DESCRIPCIÓN FÍSICA |
|---|
| Extent |
1 online resource |
| 336 ## - CONTENT TYPE |
|---|
| Content type term |
text |
| Content type code |
txt |
| Source |
rdacontent |
| 337 ## - MEDIA TYPE |
|---|
| Media type term |
computer |
| Media type code |
c |
| Source |
rdamedia |
| 338 ## - CARRIER TYPE |
|---|
| Carrier type term |
online resource |
| Carrier type code |
cr |
| Source |
rdacarrier |
| 520 ## - NOTA DE RESUMEN, ETC. |
|---|
| Summary, etc. |
An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications. Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed. The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting. Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirementsPractical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc.Practical case-studies on target performance and troubleshooting. Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry. |
| 588 ## - SOURCE OF DESCRIPTION NOTE |
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| Source of description note |
Description based on print version record. |
| 596 ## - |
|---|
| -- |
19 |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Microelectronics |
| General subdivision |
Materials. |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Flat panel displays |
| General subdivision |
Materials. |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Sputtering (Physics) |
| 650 #7 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
TECHNOLOGY & ENGINEERING / Mechanical |
| Source of heading or term |
bisacsh |
| 655 #4 - |
|---|
| -- |
Electronic books. |
| 655 #7 - |
|---|
| -- |
Electronic books. |
| -- |
local |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Print version: |
| Main entry heading |
Sarkar, Jaydeep. |
| Title |
Sputtering materials for VLSI and thin film devices |
| International Standard Book Number |
9780815515937 |
| Record control number |
(OCoLC)660539201 |
| 856 40 - LOCALIZACIÓN Y ACCESO ELECTRÓNICOS |
|---|
| Public note |
Libro electrónico |
| Materials specified |
ScienceDirect |
| Uniform Resource Identifier |
<a href="http://148.231.10.114:2048/login?url=http://www.sciencedirect.com/science/book/9780815515937">http://148.231.10.114:2048/login?url=http://www.sciencedirect.com/science/book/9780815515937</a> |
| 942 ## - TIPO DE MATERIAL (KOHA) |
|---|
| Koha item type |
Libro Electrónico |
