Introductory MEMS [recurso electrónico] : Fabrication and Applications / by Thomas M. Adams, Richard A. Layton.
Tipo de material: TextoEditor: Boston, MA : Springer US, 2010Edición: 1Descripción: XVI, 444 p. online resourceTipo de contenido: text Tipo de medio: computer Tipo de portador: online resourceISBN: 9780387095110Tema(s): Engineering | Mechanics | Materials | Electronics | Systems engineering | Surfaces (Physics) | Engineering | Electronics and Microelectronics, Instrumentation | Circuits and Systems | Mechanics | Surfaces and Interfaces, Thin Films | Continuum Mechanics and Mechanics of MaterialsFormatos físicos adicionales: Printed edition:: Sin títuloClasificación CDD: 621.381 Clasificación LoC:TK7800-8360TK7874-7874.9Recursos en línea: Libro electrónicoTipo de ítem | Biblioteca actual | Colección | Signatura | Copia número | Estado | Fecha de vencimiento | Código de barras |
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Libro Electrónico | Biblioteca Electrónica | Colección de Libros Electrónicos | TK7800 -8360 (Browse shelf(Abre debajo)) | 1 | No para préstamo | 370169-2001 |
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Fabrication -- The substrate and adding material to it -- Creating and transferring patterns—Photolithography -- Creating structures—Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers—An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories.
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
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