Multi-Wafer Rotating MEMS Machines [recurso electrónico] : Turbines, Generators, and Engines / edited by Jeffrey Lang.

Por: Lang, Jeffrey [editor.]Colaborador(es): SpringerLink (Online service)Tipo de material: TextoTextoSeries MEMS Reference ShelfEditor: Boston, MA : Springer US : Imprint: Springer, 2010Descripción: XIV, 454p. 604 illus., 302 illus. in color. online resourceTipo de contenido: text Tipo de medio: computer Tipo de portador: online resourceISBN: 9780387777474Tema(s): Engineering | Computer engineering | Electronics | Systems engineering | Electric engineering | Engineering | Electronics and Microelectronics, Instrumentation | Energy Technology | Circuits and Systems | Electrical Engineering | Energy, generalFormatos físicos adicionales: Printed edition:: Sin títuloClasificación CDD: 621.381 Clasificación LoC:TK7800-8360TK7874-7874.9Recursos en línea: Libro electrónicoTexto
Contenidos:
to PowerMEMS -- System Design Considerations and Device Overview -- Materials, Structures and Packaging -- Microengine Fabrication -- Fabrication of Microscale Rotating Magnetic Machines -- High-Speed Gas Bearings for Micro-Turbomachinery -- Thermofluidics and Turbomachinery -- Motors and Generators -- Microcombustors for Rotating Machinery.
En: Springer eBooksResumen: Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective. The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including: materials structures and packaging multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components electroplating magnetic structures into silicon very-high-speed air bearings thermofluids and turbomachinery electric and magnetic generators combustion About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus
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Tipo de ítem Biblioteca actual Colección Signatura Copia número Estado Fecha de vencimiento Código de barras
Libro Electrónico Biblioteca Electrónica
Colección de Libros Electrónicos TK7800 -8360 (Browse shelf(Abre debajo)) 1 No para préstamo 370265-2001

to PowerMEMS -- System Design Considerations and Device Overview -- Materials, Structures and Packaging -- Microengine Fabrication -- Fabrication of Microscale Rotating Magnetic Machines -- High-Speed Gas Bearings for Micro-Turbomachinery -- Thermofluidics and Turbomachinery -- Motors and Generators -- Microcombustors for Rotating Machinery.

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark Atlanta University, and the University of Maryland at College Park. The overall objective of the Micro Engine Project was to develop a small but power-dense gas turbine generator based on MEMS fabrication technologies. Thus, the project sought to develop a fuel-burning jet engine that would drive an electric generator to produce electric power for general purpose use. Along the way, the project would advance the science and engineering of many disciplines from the MEMS perspective. The Micro Engine Project was by its very nature a highly mult-disciplinary project pursuing advances in materials, structures, fabrication, combustion, heat transfer, turbomachinery, bearings and electromechanics, all at the MEMS scale. Many of these topics are addressed in this volume, including: materials structures and packaging multi-wafer MEMS fabrication and and bonding technologiesElectroplating magnetic components electroplating magnetic structures into silicon very-high-speed air bearings thermofluids and turbomachinery electric and magnetic generators combustion About The MEMs Reference Shelf: "The MEMs Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMs) which combine mechanical, electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. The series, authored by leading MEMs practitioners, strives to provide a framework where basic principles, known methodologies and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIA Massachusetts Institute of Technology, Professor of Electrical Engineering, Emeritus

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