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Design and Manufacturing of Active Microsystems [recurso electrónico] / edited by Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach.

Por: Büttgenbach, Stephanus [editor.]Colaborador(es): Burisch, Arne [editor.] | Hesselbach, Jürgen [editor.] | SpringerLink (Online service)Tipo de material: Texto

TextoSeries Microtechnology and MEMSEditor: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011Descripción: XII, 444 p. online resourceTipo de contenido: text Tipo de medio: computer Tipo de portador: online resourceISBN: 9783642129032Tema(s): Engineering | Structural control (Engineering) | Nanotechnology | Engineering | Nanotechnology and Microengineering | Mechatronics | Operating Procedures, Materials Treatment | NanotechnologyFormatos físicos adicionales: Printed edition:: Sin títuloClasificación CDD: 620.5 Clasificación LoC:T174.7Recursos en línea: Libro electrónico Texto

Contenidos:

1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

En: Springer eBooksResumen: This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Existencias ( 1 )
Notas de título ( 3 )

Existencias
Tipo de ítem	Biblioteca actual	Colección	Signatura	Copia número	Estado	Fecha de vencimiento	Código de barras
Libro Electrónico	Biblioteca Electrónica	Colección de Libros Electrónicos	T174.7 (Browse shelf(Abre debajo))	1	No para préstamo		374372-2001

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1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications.

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.