Handbook of thin film deposition [recurso electrónico] / [edited by] Krishna Seshan ; foreword by Gordon E. Moore.
Tipo de material:
TextoDetalles de publicación: [S.l.] : William Andrew, 2012Edición: [3rd ed.]Descripción: 1 online resourceISBN: 9781437778731 (electronic bk.); 1437778739 (electronic bk.)Tema(s): Thin films -- Handbooks, manuals, etc | Thin films -- Design and construction -- Handbooks, manuals, etc | Thin films | Thin films -- Design and constructionGénero/Forma: Electronic books. | Handbooks, manuals, etc.Clasificación CDD: 621.38152 Clasificación LoC:TA418.9.T45 | S47 2012Recursos en línea: Libro electrónico ScienceDirect
Resumen: The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications. Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries. The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics. Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM.
| Tipo de ítem | Biblioteca actual | Colección | Signatura | Copia número | Estado | Fecha de vencimiento | Código de barras |
|---|---|---|---|---|---|---|---|
| Libro Electrónico | Biblioteca Electrónica | Colección de Libros Electrónicos | TA418.9 .T45 S47 2012 (Browse shelf(Abre debajo)) | 1 | No para préstamo | 380534-2001 |
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| TA418.9 .N35 Nanomaterials and devices | TA418.9 .N35 Carbon nanotube reinforced composites | TA418.9 .N35 Nanotube superfiber materials | TA418.9 .T45 S47 2012 Handbook of thin film deposition | TA439 .T67 2014 Transport properties of concrete | TA439 .W584 2012 Concrete portable handbook | TA440 Thermal stresses and temperature control of mass concrete |
The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications. Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries. The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics. Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM.
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