New approaches to image processing based failure analysis of nano-scale ULSI devices / Zeev Zalevsky, Pavel Livshits, Eran Gur.

Por: Zalevsky, ZeevColaborador(es): Livshits, Pavel | Gur, EranTipo de material: TextoTextoIdioma: Inglés Series Micro & nano technologiesDetalles de publicación: Oxford : William Andrew, 2014Edición: 1st edDescripción: 101 p. : il. ; 23 cmISBN: 9780323241434; 0323241433Tema(s): Integrated circuits -- Ultra large scale integration -- Testing | Nanoelectronics | Microelectronics | Computers and IT | Circuitos integrados- -- Congresos. -- Integración a gran escalaClasificación LoC:TK7874.76 | .Z35 2014Recursos en línea: Publisher descriptionTexto Resumen: New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
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New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.

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