Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting [recurso electrónico] / by Xiao-Sheng Zhang.
Tipo de material:
TextoSeries Springer Theses, Recognizing Outstanding Ph.D. ResearchEditor: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2016Descripción: XX, 122 p. 95 illus., 76 illus. in color. online resourceTipo de contenido: text Tipo de medio: computer Tipo de portador: online resourceISBN: 9783662488164Tema(s): Engineering | Energy harvesting | Biotechnology | Nanotechnology | Electronics | Microelectronics | Engineering | Nanotechnology and Microengineering | Microengineering | Energy Harvesting | Electronics and Microelectronics, Instrumentation | NanotechnologyFormatos físicos adicionales: Printed edition:: Sin títuloClasificación CDD: 620.5 Clasificación LoC:T174.7Recursos en línea: Libro electrónico
En: Springer eBooksResumen: This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
| Tipo de ítem | Biblioteca actual | Colección | Signatura | Copia número | Estado | Fecha de vencimiento | Código de barras |
|---|---|---|---|---|---|---|---|
| Libro Electrónico | Biblioteca Electrónica | Colección de Libros Electrónicos | 1 | No para préstamo |
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.
