TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - MEMS and microsystems: design, manufacture, and nanoscale engineering 
SN  - 9780470083017
AV  - TK7874 .H794 2008
U1  - 621.381 22
PY  - 2008///
CY  - Hoboken, N. J.
PB  - John Wiley
KW  - Microelectrónica
KW  - lemb
KW  - Sistemas microelectromecánicos
KW  - Embalaje
KW  - Microelectronics
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
N1  - Incluye referencias bibliográficas (p. 509-521) e índice
UR  - http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
UR  - http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
UR  - http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html
ER  -