TY - BOOK AU - Tong,Q.-Y. AU - Gösele,U. TI - Semiconductor wafer bonding: science and technology T2 - The Electrochemical Society series SN - 9780471574811 AV - TK7871.85 T65 1999 PY - 1999/// CY - New York PB - John Wiley & Sons KW - Semiconductores KW - Unión KW - lemb KW - Oblea (Electrónica) KW - Semiconductors KW - Bonding KW - Semiconductor wafers N1 - "Sponsored by the Electrochemical Society, Inc., Pennington, New Jersey."; Incluye índice UR - http://www.loc.gov/catdir/bios/wiley041/98024397.html UR - http://www.loc.gov/catdir/description/wiley032/98024397.html UR - http://www.loc.gov/catdir/toc/onix02/98024397.html ER -