TY  - BOOK
AU  - Campbell,Stephen A.
AU  - Campbell,Stephen A.
TI  - Fabrication engineering at the micro and nanoscale
T2  - The Oxford series in electrical and computer engineering
SN  - 9780195320176 (pbk. : alk. paper)
AV  - TK7871.85 C356 2008
PY  - 2008///
CY  - New York
PB  - Oxford University Press
KW  - Semiconductores
KW  - Diseño y construcción
KW  - lemb
KW  - Semiconductors
KW  - Design and construction
N1  - Incluye referencias bibliográficas e índice
UR  - http://www.loc.gov/catdir/toc/ecip0714/2007013450.html
ER  -