TY  - BOOK
AU  - Hattori,Takeshi
TI  - Ultraclean surface processing of silicon wafers: secrets of VLSI manufacturing 
SN  - 9783540616726
AV  - TK7871.85 U58 1998
PY  - 1998///
CY  - Berlin, New York
PB  - Springer
KW  - Obleas de semiconductores
KW  - Limpieza
KW  - Silicio
KW  - Superficies
KW  - lemb
KW  - Tratamiento de superficies
KW  - Semiconductor wafers
KW  - Cleaning
KW  - Silicon
KW  - Surfaces
KW  - Surface preparation
N1  - Incluye referencias bibliográficas e índice
UR  - http://www.loc.gov/catdir/enhancements/fy0815/98010353-t.html
UR  - http://www.loc.gov/catdir/enhancements/fy0815/98010353-d.html
ER  -