TY  - BOOK
AU  - Bhushan,Manjul
AU  - Ketchen,Mark B.
ED  - SpringerLink (Online service)
TI  - Microelectronic Test Structures for CMOS Technology
SN  - 9781441993779
AV  - TK7800-8360 
U1  - 621.381 23
PY  - 2011///
CY  - New York, NY
PB  - Springer New York, Imprint: Springer
KW  - Engineering
KW  - Electronics
KW  - Systems engineering
KW  - Optical materials
KW  - Electronics and Microelectronics, Instrumentation
KW  - Optical and Electronic Materials
KW  - Circuits and Systems
N1  - Introduction -- Test Structure Basics -- Resistors -- Capacitors -- MOSFETs -- Ring Oscillators -- High Speed Characterization -- Test Structures of SOI Technology -- Test Equipment and Measurements -- Data Analysis
N2  - Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors’ overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology
UR  - http://148.231.10.114:2048/login?url=http://link.springer.com/book/10.1007/978-1-4419-9377-9
ER  -