TY  - BOOK
AU  - Büttgenbach,Stephanus
AU  - Burisch,Arne
AU  - Hesselbach,Jürgen
ED  - SpringerLink (Online service)
TI  - Design and Manufacturing of Active Microsystems
T2  - Microtechnology and MEMS,
SN  - 9783642129032
AV  - T174.7 
U1  - 620.5 23
PY  - 2011///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Engineering
KW  - Structural control (Engineering)
KW  - Nanotechnology
KW  - Nanotechnology and Microengineering
KW  - Mechatronics
KW  - Operating Procedures, Materials Treatment
N1  - 1. Introduction -- 2. Design and Construction -- 3. Guiding and Measuring in Active Microsystems -- 4. Manufacturing and Fabrication -- 5. Microassembly -- 6.Industrial Applications
N2  - This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems
UR  - http://148.231.10.114:2048/login?url=http://link.springer.com/book/10.1007/978-3-642-12903-2
ER  -