TY  - BOOK
AU  - Nazarov,Alexei
AU  - Colinge,J.-P.
AU  - Balestra,Francis
AU  - Raskin,Jean-Pierre
AU  - Gamiz,Francisco
AU  - Lysenko,V.S.
ED  - SpringerLink (Online service)
TI  - Semiconductor-On-Insulator Materials for Nanoelectronics Applications
T2  - Engineering Materials,
SN  - 9783642158681
AV  - T174.7 
U1  - 620.5 23
PY  - 2011///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg
KW  - Engineering
KW  - Nanotechnology
KW  - Surfaces (Physics)
KW  - Nanotechnology and Microengineering
KW  - Semiconductors
KW  - Characterization and Evaluation of Materials
N1  - New semiconductor-on-insulator materials -- Physics of modern SemOI devices -- Diagnostics of the SOI devices -- Sensors and MEMS on SOI
N2  - "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics
UR  - http://148.231.10.114:2048/login?url=http://link.springer.com/book/10.1007/978-3-642-15868-1
ER  -