TY  - BOOK
AU  - Zhang,Xiao-Sheng
ED  - SpringerLink (Online service)
TI  - Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
T2  - Springer Theses, Recognizing Outstanding Ph.D. Research,
SN  - 9783662488164
AV  - T174.7 
U1  - 620.5 23
PY  - 2016///
CY  - Berlin, Heidelberg
PB  - Springer Berlin Heidelberg, Imprint: Springer
KW  - Engineering
KW  - Energy harvesting
KW  - Biotechnology
KW  - Nanotechnology
KW  - Electronics
KW  - Microelectronics
KW  - Nanotechnology and Microengineering
KW  - Microengineering
KW  - Energy Harvesting
KW  - Electronics and Microelectronics, Instrumentation
N2  - This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem
UR  - http://148.231.10.114:2048/login?url=http://dx.doi.org/10.1007/978-3-662-48816-4
ER  -