TY  - BOOK
AU  - Ru,Changhai
AU  - Liu,Xinyu
AU  - Sun,Yu
ED  - SpringerLink (Online service)
TI  - Nanopositioning Technologies: Fundamentals and Applications 
SN  - 9783319238531
AV  - T174.7 
U1  - 620.5 23
PY  - 2016///
CY  - Cham
PB  - Springer International Publishing, Imprint: Springer
KW  - Engineering
KW  - Engineering design
KW  - Nanotechnology
KW  - Control engineering
KW  - Robotics
KW  - Mechatronics
KW  - Electronics
KW  - Microelectronics
KW  - Nanotechnology and Microengineering
KW  - Electronics and Microelectronics, Instrumentation
KW  - Control, Robotics, Mechatronics
KW  - Engineering Design
N1  - 1.A review of Stick-Slip Nanopositioning Actuators -- 2. Piezoelectric Motor Technology - A Review -- 3.Design of High-speed Nanopositioning Systems -- 4.Parallel-Kinematic Nanopositioning Stages Based on Roberts Mechanism -- 5.Electro-magnetic Nano Positioning -- 6.Modeling of piezoelectric-actuated nanopositioning stages involving with the hysteresis -- 7. Tracking Control for Nanopositioning -- 8.Position Sensors for Nanopositioning -- 9. MEMS Nanopositioners -- 10.Control Issues of MEMS nanopositioning devices -- 11. A Review of Nanomanipulation in Scanning Electron Microscopes -- 12. Nanopositioning for lithography and data storage
N2  - This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries
UR  - http://148.231.10.114:2048/login?url=http://dx.doi.org/10.1007/978-3-319-23853-1
ER  -