TY - BOOK AU - Ivanov,Alexey ED - SpringerLink (Online service) TI - Silicon Anodization as a Structuring Technique: Literature Review, Modeling and Experiments SN - 9783658192389 AV - T174.7 U1 - 620.5 23 PY - 2018/// CY - Wiesbaden PB - Springer Fachmedien Wiesbaden, Imprint: Springer Vieweg KW - Nanotechnology KW - Applied mathematics KW - Engineering mathematics KW - Thermodynamics KW - Heat engineering KW - Heat transfer KW - Mass transfer KW - Nanotechnology and Microengineering KW - Mathematical and Computational Engineering KW - Engineering Thermodynamics, Heat and Mass Transfer N1 - Acceso multiusuario; Silicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation N2 - Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing