TY  - BOOK
AU  - Van Zant,Peter
TI  - Microchip fabrication: a practical guide to semiconductor processing 
SN  - 9780071821018 (hardback)
AV  - TK7871.85  V35 2014
PY  - 2014///
CY  - New York
PB  - McGraw-Hill Professional
KW  - Semiconductors
KW  - Design and construction
KW  - Semiconductores
N1  - Incluye referencias bibliográficas e índice
ER  -