| 000 | 01395cam a2200361 a 4500 | ||
|---|---|---|---|
| 001 | u318035 | ||
| 003 | SIRSI | ||
| 005 | 20240920153032.0 | ||
| 008 | 100304s2004 njua fr 001 0 eng c | ||
| 020 | _a9780471232797 | ||
| 020 | _a0471232793 | ||
| 040 |
_aUKM _cUKM _dHKP _dFUG _dDLC |
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| 042 | _alccopycat | ||
| 050 | 0 |
_aTK7871.85 _bM39 2004 |
|
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor fabrication / _cGary S. May, Simon M. Sze. |
| 260 |
_aHoboken, NJ : _bWiley & Sons, _cc2004. |
||
| 300 |
_axiii, 305 p. : _bil. ; _c26 cm. |
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| 504 | _aIncluye referencias bibliográficas e índice. | ||
| 590 | _aCveAsig: 36177; | ||
| 590 | _aProgEdu: 7006; 29003; | ||
| 590 | _aAresCon: INGENIERÍA.TECNOLOGÍA; | ||
| 650 | 7 |
_aSemiconductores _xDiseño y construcción. _2lemb |
|
| 650 | 7 |
_aCircuitos integrados _xDiseño y construcción. _2lemb |
|
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 700 | 1 |
_aSze, S. M., _d1936-, _ecoaut. |
|
| 856 | 4 | 2 |
_3Contributor biographical information _uhttp://www.loc.gov/catdir/bios/wiley044/2003276248.html |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/description/wiley037/2003276248.html |
| 856 | 4 | 1 |
_3Table of contents _uhttp://www.loc.gov/catdir/toc/wiley032/2003276248.html |
| 942 | _cRES_ABS | ||
| 999 |
_c159717 _d159717 |
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