| 000 | 01262cam a2200349 a 4500 | ||
|---|---|---|---|
| 001 | u318354 | ||
| 003 | SIRSI | ||
| 005 | 20240920152645.0 | ||
| 008 | 100317s2006 njua fr 001 0 eng c | ||
| 020 | _a0471784060 (cloth : alk. paper) | ||
| 020 | _a9780471784067 | ||
| 040 |
_aDLC _cDLC _dUKM _dBAKER _dC#P _dCOO _dDLC |
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| 042 | _apcc | ||
| 050 | 0 |
_aTK7871.85 _bM393 2006 |
|
| 100 | 1 | _aMay, Gary S. | |
| 245 | 1 | 0 |
_aFundamentals of semiconductor manufacturing and process control / _cGary S. May, Costas J. Spanos. |
| 260 |
_aHoboken, NJ : _bWiley-Interscience, _cc2006. |
||
| 300 |
_axix, 463 p. : _bil. ; _c25 cm. |
||
| 504 | _aIncluye referencias biliográficas e índice. | ||
| 590 | _aCveAsig: 36177; | ||
| 590 | _aProgEdu: 7006; 29003; | ||
| 590 | _aAresCon: INGENIERÍA.TECNOLOGÍA; | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 |
_aProcess control _xStatistical methods. |
|
| 650 | 7 |
_aSemiconductores _xDiseño y construcción. _2lemb |
|
| 650 | 7 |
_aCircuitos integrados _xDiseño y construcción. _2lemb |
|
| 650 | 7 |
_aControl del proceso _xMétodos estadísticos. _2lemb |
|
| 700 | 1 | _aSpanos, Costas J. | |
| 942 | _cRES_ABS | ||
| 999 |
_c160025 _d160025 |
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