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007			cr nn 008mamaa
008			110520s2011 xxu| s |||| 0|eng d
020			_a9781461402107 _9978-1-4614-0210-7
040			_cMX-MeUAM
050		4	_aT174.7
082	0	4	_a620.5 _223
100	1		_aProulx, Tom. _eeditor.
245	1	0	_aMEMS and Nanotechnology, Volume 4 _h[recurso electrónico] : _bProceedings of the 2011 Annual Conference on Experimental and Applied Mechanics / _cedited by Tom Proulx.
264		1	_aNew York, NY : _bSpringer New York : _bImprint: Springer, _c2011.
300			_aVIII, 192 p. _bonline resource.
336			_atext _btxt _2rdacontent
337			_acomputer _bc _2rdamedia
338			_aonline resource _bcr _2rdacarrier
347			_atext file _bPDF _2rda
490	1		_aConference Proceedings of the Society for Experimental Mechanics Series, _x2191-5644
505	0		_aIntegrated Process Feasibility of Hard-mask for Tight Pitch Interconnects Fabrication -- Thermoelectric Effects in Current Induced Crystallization of Silicon Microstructures -- Evaluation of Resistance Measurement Techniques in Carbon Black and Carbon -- Nano-tubes Reinforced Epoxy -- A Nano-tensile Tester for Creep Studies -- The Measurement of Cyclic Creep Behavior in Copper Thin Film Using Microtensile Testing -- New Insight Into Pile-Up in Thin Film Indentation -- Measuring Substrate-independent Young’s Modulus of Thin Films -- Analysis of Spherical Indentation of an Elastic Bilayer Using a Modified Perturbation Approach -- Nano-indentation Studies of Polyglactin 910 Monofilament Sutures -- Analytical Approach for the Determination of Nanomechanical Properties for Metals -- Advances in Thin Film Indentation -- Cyclic Nanoindentation Shakedown of Muscovite and its Elastic Modulus Measurement -- Assessment of Digital Holography for 3D-shape Measurement of Micro Deep Drawing Parts in Comparison to Confocal Microscopy -- Full-field Bulge Testing Using Global Digital Image Correlation -- Experimental Investigation of Deformation Mechanisms Present in Ultrafine-grained Metals -- Characterization of  a Variation on AFIT's Tunable MEMS Cantilever Array Metamaterial -- MEMS for Real-time Infrared Imaging -- New Insights Into Enhancing Microcantilever MEMS Sensors -- A Miniature MRI-compatible Fiber-optic Force Sensor Utilizing Fabry-Perot Interferometer -- Micromechanical Structure With Stable Linear Positive and Negative Stiffness -- Terahertz Metamaterial Structures Fabricated by PolyMUMPs -- Investigations Into 1D and 2D Metamaterials at Infrared Wavelengths -- MEMS Integrated Metamaterials With Variable Resonance Operating at RF Frequencies -- Creep Measurements in Free-standing Thin Metal Film Micro-cantilever Bending -- MEMS Reliability for Space Applications by Elimination of Potential Failure Modes Through Analysis -- Analysis and Evaluation Methods Associated With the Application of Compliant Thermal Interface Materials in Multi-chip Electronic Board Assemblies -- Hierarchical Reliability Model for Life Prediction of Actively Cooled LED-based Luminaire -- Direct Determination of Interfacial Traction-separation Relations in Chip-package Systems.
520			_aMEMS and Nanotechnology represents one of eight volumes of technical papers presented at the Society for Experimental Mechanics Annual Conference & Exposition on Experimental and Applied Mechanics, held at Uncasville, Connecticut, June 13-16, 2011.  The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Mechanics of Biological Systems and Materials, Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials; Optical Measurements, Modeling and, Metrology; Experimental and Applied Mechanics, Thermomechanics and Infra-Red Imaging, and Engineering Applications of Residual Stress.
650		0	_aEngineering.
650		0	_aNanotechnology.
650	1	4	_aEngineering.
650	2	4	_aNanotechnology and Microengineering.
650	2	4	_aMechatronics.
650	2	4	_aNanotechnology.
710	2		_aSpringerLink (Online service)
773	0		_tSpringer eBooks
776	0	8	_iPrinted edition: _z9781461402091
830		0	_aConference Proceedings of the Society for Experimental Mechanics Series, _x2191-5644
856	4	0	_zLibro electrónico _uhttp://148.231.10.114:2048/login?url=http://link.springer.com/book/10.1007/978-1-4614-0210-7
596			_a19
942			_cLIBRO_ELEC
999			_c200277 _d200277