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008 100301s2010 ne | s |||| 0|eng d
020 _a9789048125203
_9978-90-481-2520-3
040 _cMX-MeUAM
050 4 _aTA174
082 0 4 _a620.0042
_223
100 1 _aDeulin, E. A.
_eauthor.
245 1 0 _aMechanics and Physics of Precise Vacuum Mechanisms
_h[recurso electrónico] /
_cby E. A. Deulin, V. P. Mikhailov, Yu V. Panfilov, R. A. Nevshupa.
264 1 _aDordrecht :
_bSpringer Netherlands,
_c2010.
300 _bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aFluid Mechanics and Its Applications,
_x0926-5112 ;
_v91
505 0 _aUsing Precise Mechanisms in Modern Vacuum Technological Equipment -- Typical Vacuum Mechanisms -- Friction in Vacuum -- Matrix Method of the Design of New Mechanisms Structure -- Precision of Vacuum Mechanisms -- Vacuum Mechanisms of Nanoscale Precision -- Ultrahigh Vacuum Rotary-Motion Feedthroughs -- Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs -- Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation -- Flow of Microparticles Originating from Mechanisms in Vacuum.
520 _aIn this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the method of microparticles flow regulation and its determination in vacuum equipment and mechanisms of electronics; precise mechanisms of nanoscale precision based on magnetic and electric rheology; precise harmonic rotary and not-coaxial nut-screw linear motion vacuum feedthroughs with technical parameters considered the best in the world; elastically deformed vacuum motion feedthroughs without friction couples usage; the computer system of vacuum mechanisms failure predicting. This English edition incorporates a number of features which should improve its usefulness as a textbook without changing the basic organization or the general philosophy of presentation of the subject matter of the original Russian work. Experience at the Bauman Moscow State Technical University and other schools shows that the book will be useful to engineering students who wish to prepare for more advanced studies and applications of vacuum science, technology and its applications.
650 0 _aEngineering.
650 0 _aVibration.
650 0 _aEngineering design.
650 0 _aChemistry, inorganic.
650 0 _aSurfaces (Physics).
650 1 4 _aEngineering.
650 2 4 _aEngineering Design.
650 2 4 _aEngineering, general.
650 2 4 _aTribology, Corrosion and Coatings.
650 2 4 _aSurfaces and Interfaces, Thin Films.
650 2 4 _aVibration, Dynamical Systems, Control.
700 1 _aMikhailov, V. P.
_eauthor.
700 1 _aPanfilov, Yu V.
_eauthor.
700 1 _aNevshupa, R. A.
_eauthor.
710 2 _aSpringerLink (Online service)
773 0 _tSpringer eBooks
776 0 8 _iPrinted edition:
_z9789048125197
830 0 _aFluid Mechanics and Its Applications,
_x0926-5112 ;
_v91
856 4 0 _zLibro electrónico
_uhttp://148.231.10.114:2048/login?url=http://link.springer.com/book/10.1007/978-90-481-2520-3
596 _a19
942 _cLIBRO_ELEC
999 _c205332
_d205332