000 | 02730nam a22005295i 4500 | ||
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001 | 978-3-662-48816-4 | ||
003 | DE-He213 | ||
005 | 20180206183024.0 | ||
007 | cr nn 008mamaa | ||
008 | 151201s2016 gw | s |||| 0|eng d | ||
020 |
_a9783662488164 _9978-3-662-48816-4 |
||
050 | 4 | _aT174.7 | |
072 | 7 |
_aTDPB _2bicssc |
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072 | 7 |
_aTEC027000 _2bisacsh |
|
082 | 0 | 4 |
_a620.5 _223 |
100 | 1 |
_aZhang, Xiao-Sheng. _eauthor. |
|
245 | 1 | 0 |
_aMicro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting _h[recurso electrónico] / _cby Xiao-Sheng Zhang. |
264 | 1 |
_aBerlin, Heidelberg : _bSpringer Berlin Heidelberg : _bImprint: Springer, _c2016. |
|
300 |
_aXX, 122 p. 95 illus., 76 illus. in color. _bonline resource. |
||
336 |
_atext _btxt _2rdacontent |
||
337 |
_acomputer _bc _2rdamedia |
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338 |
_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
||
490 | 1 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5053 |
|
520 | _aThis book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem. | ||
650 | 0 | _aEngineering. | |
650 | 0 | _aEnergy harvesting. | |
650 | 0 | _aBiotechnology. | |
650 | 0 | _aNanotechnology. | |
650 | 0 | _aElectronics. | |
650 | 0 | _aMicroelectronics. | |
650 | 1 | 4 | _aEngineering. |
650 | 2 | 4 | _aNanotechnology and Microengineering. |
650 | 2 | 4 | _aMicroengineering. |
650 | 2 | 4 | _aEnergy Harvesting. |
650 | 2 | 4 | _aElectronics and Microelectronics, Instrumentation. |
650 | 2 | 4 | _aNanotechnology. |
710 | 2 | _aSpringerLink (Online service) | |
773 | 0 | _tSpringer eBooks | |
776 | 0 | 8 |
_iPrinted edition: _z9783662488140 |
830 | 0 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5053 |
|
856 | 4 | 0 |
_zLibro electrónico _uhttp://148.231.10.114:2048/login?url=http://dx.doi.org/10.1007/978-3-662-48816-4 |
912 | _aZDB-2-ENG | ||
942 | _cLIBRO_ELEC | ||
999 |
_c226469 _d226469 |