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020 _a9783658192389
_9978-3-658-19238-9
050 4 _aT174.7
072 7 _aTDPB
_2bicssc
072 7 _aTEC027000
_2bisacsh
072 7 _aTDP
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082 0 4 _a620.5
_223
100 1 _aIvanov, Alexey.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
245 1 0 _aSilicon Anodization as a Structuring Technique
_h[electronic resource] :
_bLiterature Review, Modeling and Experiments /
_cby Alexey Ivanov.
250 _a1st ed. 2018.
264 1 _aWiesbaden :
_bSpringer Fachmedien Wiesbaden :
_bImprint: Springer Vieweg,
_c2018.
300 _aXXIX, 316 p. 141 illus., 3 illus. in color.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
500 _aAcceso multiusuario
505 0 _aSilicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation.
520 _aAlexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working  as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries.
541 _fUABC ;
_cTemporal ;
_d01/01/2021-12/31/2023.
650 0 _aNanotechnology.
650 0 _aApplied mathematics.
650 0 _aEngineering mathematics.
650 0 _aThermodynamics.
650 0 _aHeat engineering.
650 0 _aHeat transfer.
650 0 _aMass transfer.
650 1 4 _aNanotechnology and Microengineering.
_0https://scigraph.springernature.com/ontologies/product-market-codes/T18000
650 2 4 _aMathematical and Computational Engineering.
_0https://scigraph.springernature.com/ontologies/product-market-codes/T11006
650 2 4 _aEngineering Thermodynamics, Heat and Mass Transfer.
_0https://scigraph.springernature.com/ontologies/product-market-codes/T14000
710 2 _aSpringerLink (Online service)
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9783658192372
776 0 8 _iPrinted edition:
_z9783658192396
856 4 0 _zLibro electrónico
_uhttp://148.231.10.114:2048/login?url=https://doi.org/10.1007/978-3-658-19238-9
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cLIBRO_ELEC
999 _c244646
_d244645