000 | 03706nam a22005775i 4500 | ||
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001 | 978-3-658-19238-9 | ||
003 | DE-He213 | ||
005 | 20210201191535.0 | ||
007 | cr nn 008mamaa | ||
008 | 170911s2018 gw | s |||| 0|eng d | ||
020 |
_a9783658192389 _9978-3-658-19238-9 |
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050 | 4 | _aT174.7 | |
072 | 7 |
_aTDPB _2bicssc |
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072 | 7 |
_aTEC027000 _2bisacsh |
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072 | 7 |
_aTDP _2thema |
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082 | 0 | 4 |
_a620.5 _223 |
100 | 1 |
_aIvanov, Alexey. _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut |
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245 | 1 | 0 |
_aSilicon Anodization as a Structuring Technique _h[electronic resource] : _bLiterature Review, Modeling and Experiments / _cby Alexey Ivanov. |
250 | _a1st ed. 2018. | ||
264 | 1 |
_aWiesbaden : _bSpringer Fachmedien Wiesbaden : _bImprint: Springer Vieweg, _c2018. |
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300 |
_aXXIX, 316 p. 141 illus., 3 illus. in color. _bonline resource. |
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336 |
_atext _btxt _2rdacontent |
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_acomputer _bc _2rdamedia |
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_aonline resource _bcr _2rdacarrier |
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347 |
_atext file _bPDF _2rda |
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500 | _aAcceso multiusuario | ||
505 | 0 | _aSilicon Anodization: State of the Art -- Experimental, Characterization and Simulation Methods -- Microscale Study of Anodization Process -- Anodization Process as a Structuring Technique: Experiments and Simulation. | |
520 | _aAlexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed. Contents Silicon Anodization: State of the Art Experimental, Characterization and Simulation Methods Microscale Study of Anodization Process Anodization Process as a Structuring Technique: Experiments and Simulation Target Groups Researchers and students of microsystems technology, electrochemistry, microengineering Practitioners in the area of microsystems, silicon processing and electrochemical material processing <The Author Alexey Ivanov is currently working as a research scientist at the Fraunhofer Institute for Solar Energy Systems (Fraunhofer ISE, Germany) on developing and optimizing anodization processes for large-scale fabrication of semiconductor photovoltaic cells and batteries. | ||
541 |
_fUABC ; _cTemporal ; _d01/01/2021-12/31/2023. |
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650 | 0 | _aNanotechnology. | |
650 | 0 | _aApplied mathematics. | |
650 | 0 | _aEngineering mathematics. | |
650 | 0 | _aThermodynamics. | |
650 | 0 | _aHeat engineering. | |
650 | 0 | _aHeat transfer. | |
650 | 0 | _aMass transfer. | |
650 | 1 | 4 |
_aNanotechnology and Microengineering. _0https://scigraph.springernature.com/ontologies/product-market-codes/T18000 |
650 | 2 | 4 |
_aMathematical and Computational Engineering. _0https://scigraph.springernature.com/ontologies/product-market-codes/T11006 |
650 | 2 | 4 |
_aEngineering Thermodynamics, Heat and Mass Transfer. _0https://scigraph.springernature.com/ontologies/product-market-codes/T14000 |
710 | 2 | _aSpringerLink (Online service) | |
773 | 0 | _tSpringer Nature eBook | |
776 | 0 | 8 |
_iPrinted edition: _z9783658192372 |
776 | 0 | 8 |
_iPrinted edition: _z9783658192396 |
856 | 4 | 0 |
_zLibro electrónico _uhttp://148.231.10.114:2048/login?url=https://doi.org/10.1007/978-3-658-19238-9 |
912 | _aZDB-2-ENG | ||
912 | _aZDB-2-SXE | ||
942 | _cLIBRO_ELEC | ||
999 |
_c244646 _d244645 |