000 03185nam a22005895i 4500
001 978-981-10-6165-3
003 DE-He213
005 20210201191535.0
007 cr nn 008mamaa
008 170908s2018 si | s |||| 0|eng d
020 _a9789811061653
_9978-981-10-6165-3
050 4 _aTS1-2301
072 7 _aTGP
_2bicssc
072 7 _aTEC020000
_2bisacsh
072 7 _aTGP
_2thema
082 0 4 _a670
_223
100 1 _aCheng, Jie.
_eauthor.
_4aut
_4http://id.loc.gov/vocabulary/relators/aut
245 1 0 _aResearch on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect
_h[electronic resource] /
_cby Jie Cheng.
250 _a1st ed. 2018.
264 1 _aSingapore :
_bSpringer Singapore :
_bImprint: Springer,
_c2018.
300 _aXVIII, 137 p. 103 illus.
_bonline resource.
336 _atext
_btxt
_2rdacontent
337 _acomputer
_bc
_2rdamedia
338 _aonline resource
_bcr
_2rdacarrier
347 _atext file
_bPDF
_2rda
490 1 _aSpringer Theses, Recognizing Outstanding Ph.D. Research,
_x2190-5053
500 _aAcceso multiusuario
520 _aThis thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research.
541 _fUABC ;
_cTemporal ;
_d01/01/2021-12/31/2023.
650 0 _aManufactures.
650 0 _aTribology.
650 0 _aCorrosion and anti-corrosives.
650 0 _aCoatings.
650 0 _aElectronics.
650 0 _aMicroelectronics.
650 1 4 _aManufacturing, Machines, Tools, Processes.
_0https://scigraph.springernature.com/ontologies/product-market-codes/T22050
650 2 4 _aTribology, Corrosion and Coatings.
_0https://scigraph.springernature.com/ontologies/product-market-codes/Z15000
650 2 4 _aElectronics and Microelectronics, Instrumentation.
_0https://scigraph.springernature.com/ontologies/product-market-codes/T24027
710 2 _aSpringerLink (Online service)
773 0 _tSpringer Nature eBook
776 0 8 _iPrinted edition:
_z9789811061646
776 0 8 _iPrinted edition:
_z9789811061660
776 0 8 _iPrinted edition:
_z9789811355851
830 0 _aSpringer Theses, Recognizing Outstanding Ph.D. Research,
_x2190-5053
856 4 0 _zLibro electrónico
_uhttp://148.231.10.114:2048/login?url=https://doi.org/10.1007/978-981-10-6165-3
912 _aZDB-2-ENG
912 _aZDB-2-SXE
942 _cLIBRO_ELEC
999 _c244650
_d244649