000 | 03185nam a22005895i 4500 | ||
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001 | 978-981-10-6165-3 | ||
003 | DE-He213 | ||
005 | 20210201191535.0 | ||
007 | cr nn 008mamaa | ||
008 | 170908s2018 si | s |||| 0|eng d | ||
020 |
_a9789811061653 _9978-981-10-6165-3 |
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050 | 4 | _aTS1-2301 | |
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_aTGP _2bicssc |
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_aTEC020000 _2bisacsh |
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_aTGP _2thema |
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_a670 _223 |
100 | 1 |
_aCheng, Jie. _eauthor. _4aut _4http://id.loc.gov/vocabulary/relators/aut |
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245 | 1 | 0 |
_aResearch on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect _h[electronic resource] / _cby Jie Cheng. |
250 | _a1st ed. 2018. | ||
264 | 1 |
_aSingapore : _bSpringer Singapore : _bImprint: Springer, _c2018. |
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300 |
_aXVIII, 137 p. 103 illus. _bonline resource. |
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336 |
_atext _btxt _2rdacontent |
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337 |
_acomputer _bc _2rdamedia |
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_aonline resource _bcr _2rdacarrier |
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_atext file _bPDF _2rda |
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490 | 1 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5053 |
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500 | _aAcceso multiusuario | ||
520 | _aThis thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research. | ||
541 |
_fUABC ; _cTemporal ; _d01/01/2021-12/31/2023. |
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650 | 0 | _aManufactures. | |
650 | 0 | _aTribology. | |
650 | 0 | _aCorrosion and anti-corrosives. | |
650 | 0 | _aCoatings. | |
650 | 0 | _aElectronics. | |
650 | 0 | _aMicroelectronics. | |
650 | 1 | 4 |
_aManufacturing, Machines, Tools, Processes. _0https://scigraph.springernature.com/ontologies/product-market-codes/T22050 |
650 | 2 | 4 |
_aTribology, Corrosion and Coatings. _0https://scigraph.springernature.com/ontologies/product-market-codes/Z15000 |
650 | 2 | 4 |
_aElectronics and Microelectronics, Instrumentation. _0https://scigraph.springernature.com/ontologies/product-market-codes/T24027 |
710 | 2 | _aSpringerLink (Online service) | |
773 | 0 | _tSpringer Nature eBook | |
776 | 0 | 8 |
_iPrinted edition: _z9789811061646 |
776 | 0 | 8 |
_iPrinted edition: _z9789811061660 |
776 | 0 | 8 |
_iPrinted edition: _z9789811355851 |
830 | 0 |
_aSpringer Theses, Recognizing Outstanding Ph.D. Research, _x2190-5053 |
|
856 | 4 | 0 |
_zLibro electrónico _uhttp://148.231.10.114:2048/login?url=https://doi.org/10.1007/978-981-10-6165-3 |
912 | _aZDB-2-ENG | ||
912 | _aZDB-2-SXE | ||
942 | _cLIBRO_ELEC | ||
999 |
_c244650 _d244649 |