000 00399nam a22001457a 4500
005 20250129142643.0
020 _a0849312620
020 _a9780849312625
245 _aMems and Nems : systems, devices and structures /
_cSergey Edward Lyshevski
260 _bCRC Press,
_c2007
590 _aCveAsig: 44576;
590 _aProgEdu: 33212;
590 _aAresCon: INGENIERÍA.TECNOLOGÍA;
999 _c271343
_d271342
942 _6_