| 000 | 00369nam a22001337a 4500 | ||
|---|---|---|---|
| 005 | 20250204111157.0 | ||
| 020 | _a9781032836737 (Paperback) | ||
| 245 |
_aMicrolithography : science and technology / _cBruce W. Smith |
||
| 260 |
_bCRC Press, _c2024 |
||
| 590 | _aCveAsig: 44591; | ||
| 590 | _aProgEdu: 33212; | ||
| 590 | _aAresCon: INGENIERÍA.TECNOLOGÍA; | ||
| 999 |
_c271486 _d271485 |
||
| 942 | _6_ | ||