| 000 | 00636cam a2200241 4500 | ||
|---|---|---|---|
| 001 | u190766 | ||
| 003 | SIRSI | ||
| 008 | 020212b1999 a r eng | ||
| 020 | _a3-527-29561-5 | ||
| 040 | _cMX-MeUAM | ||
| 041 | 1 | _aeng | |
| 050 | 4 |
_aTK7872 _b.M3 K64 |
|
| 100 | 1 |
_aKohler, J. M. (J. Michael), _d1956-. |
|
| 245 | 1 | 0 |
_aEtching in microsystem technology / _cMichael Kohler. |
| 260 |
_aWeinheim : _bWiley, _c1999. |
||
| 300 |
_axvi, 368 p. ; _c 24 cm. |
||
| 504 | _aIncluye bibliografia. | ||
| 690 | _aMasks (Electronics). | ||
| 690 | _aMicrolitografia. | ||
| 690 | _aPlasma etching. | ||
| 596 | _a9 | ||
| 942 | _cLIBRO | ||
| 999 |
_c51678 _d51678 |
||