Fabrication engineering at the micro and nanoscale /
Campbell, Stephen A., 1954-
Fabrication engineering at the micro and nanoscale / Stephen A. Campbell. - 3rd ed. - New York : Oxford University Press, 2008. - xiv, 647 p. : il. ; 24 cm. - The Oxford series in electrical and computer engineering . - Oxford series in electrical and computer engineering. .
Incluye referencias bibliográficas e índice.
9780195320176 (pbk. : alk. paper) 0195320174 (pbk. : alk. paper)
Semiconductores--Diseño y construcción.
Semiconductors--Design and construction.
TK7871.85 / C356 2008
Fabrication engineering at the micro and nanoscale / Stephen A. Campbell. - 3rd ed. - New York : Oxford University Press, 2008. - xiv, 647 p. : il. ; 24 cm. - The Oxford series in electrical and computer engineering . - Oxford series in electrical and computer engineering. .
Incluye referencias bibliográficas e índice.
9780195320176 (pbk. : alk. paper) 0195320174 (pbk. : alk. paper)
Semiconductores--Diseño y construcción.
Semiconductors--Design and construction.
TK7871.85 / C356 2008
