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Ultraclean surface processing of silicon wafers : secrets of VLSI manufacturing / Takeshi Hattori (ed.). - Berlin ; New York : Springer, c1998. - xxviii, 616 p. : il. ; 24 cm.

Incluye referencias bibliográficas e índice.

ISBN: 9783540616726 3540616721 (alk. paper)

LCCN: 98010353

Subjects--Topical Terms:
Obleas de semiconductores--Limpieza.
Silicio--Superficies.
Tratamiento de superficies.
Semiconductor wafers--Cleaning.
Silicon--Surfaces.
Surface preparation.

LC Class. No.: TK7871.85 / U58 1998