MARC details
| 000 -LÍDER |
|---|
| fixed length control field |
01209cam a2200337 a 4500 |
| 001 - NÚMERO DE CONTROL |
|---|
| control field |
u322721 |
| 003 - IDENTIFICADOR DEL NÚMERO DE CONTROL |
|---|
| control field |
SIRSI |
| 005 - FECHA Y HORA DE LA ULTIMA TRANSACCIÓN |
|---|
| control field |
20160812064622.0 |
| 008 - ELEMENTOS DE LONGITUD FIJA -- INFORMACIÓN GENERAL |
|---|
| fixed length control field |
101006s1998 ge a frb 001 0 eng c |
| 010 ## - NÚMERO DE CONTROL DE LA BIBLIOTECA DEL CONGRESO |
|---|
| LC control number |
98010353 |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
|---|
| International Standard Book Number |
9783540616726 |
| 020 ## - NÚMERO INTERNACIONAL NORMALIZADO PARA LIBROS |
|---|
| International Standard Book Number |
3540616721 (alk. paper) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| -- |
(DLC) 98010353 |
| 040 ## - FUENTE DE CATALOGACIÓN |
|---|
| Original cataloging agency |
DLC |
| Transcribing agency |
DLC |
| Modifying agency |
DLC |
| 050 #0 - SIGNATURA TOPOGRÁFICA DE LA BIBLIOTECA DEL CONGRESO |
|---|
| Classification number |
TK7871.85 |
| Item number |
U58 1998 |
| 245 00 - MENCIÓN DE TITULO |
|---|
| Title |
Ultraclean surface processing of silicon wafers : |
| Remainder of title |
secrets of VLSI manufacturing / |
| Statement of responsibility, etc. |
Takeshi Hattori (ed.). |
| 260 ## - PUBLICACIÓN, DISTRIBUCIÓN, ETC. (PIE DE IMPRENTA) |
|---|
| Place of publication, distribution, etc. |
Berlin ; |
| -- |
New York : |
| Name of publisher, distributor, etc. |
Springer, |
| Date of publication, distribution, etc. |
c1998. |
| 300 ## - DESCRIPCIÓN FÍSICA |
|---|
| Extent |
xxviii, 616 p. : |
| Other physical details |
il. ; |
| Dimensions |
24 cm. |
| 504 ## - NOTA DE BIBLIOGRAFÍA, ETC. |
|---|
| Bibliography, etc |
Incluye referencias bibliográficas e índice. |
| 596 ## - |
|---|
| -- |
2 |
| 650 #4 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Obleas de semiconductores |
| General subdivision |
Limpieza. |
| 650 #7 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Silicio |
| General subdivision |
Superficies. |
| Source of heading or term |
lemb |
| 650 #4 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Tratamiento de superficies. |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Semiconductor wafers |
| General subdivision |
Cleaning. |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Silicon |
| General subdivision |
Surfaces. |
| 650 #0 - ASIENTO SECUNDARIO DE MATERIA - TERMINO TEMÁTICO |
|---|
| Topical term or geographic name as entry element |
Surface preparation. |
| 700 1# - ASIENTO SECUNDARIO - NOMBRE PERSONAL |
|---|
| Personal name |
Hattori, Takeshi, |
| Dates associated with a name |
1945- |
| 856 41 - LOCALIZACIÓN Y ACCESO ELECTRÓNICOS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0815/98010353-t.html">http://www.loc.gov/catdir/enhancements/fy0815/98010353-t.html</a> |
| 856 42 - LOCALIZACIÓN Y ACCESO ELECTRÓNICOS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0815/98010353-d.html">http://www.loc.gov/catdir/enhancements/fy0815/98010353-d.html</a> |
| 942 ## - TIPO DE MATERIAL (KOHA) |
|---|
| Koha item type |
Libro |
