MARC details
| 000 -LIDER |
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| fixed length control field |
03185nam a22005895i 4500 |
| 001 - CONTROL NUMBER |
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| control field |
978-981-10-6165-3 |
| 003 - CONTROL NUMBER IDENTIFIER |
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| control field |
DE-He213 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
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| control field |
20210201191535.0 |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
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| fixed length control field |
cr nn 008mamaa |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
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| fixed length control field |
170908s2018 si | s |||| 0|eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
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| International Standard Book Number |
9789811061653 |
| -- |
978-981-10-6165-3 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
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| Classification number |
TS1-2301 |
| 072 #7 - SUBJECT CATEGORY CODE |
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| Subject category code |
TGP |
| Source |
bicssc |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
TEC020000 |
| Source |
bisacsh |
| 072 #7 - SUBJECT CATEGORY CODE |
|---|
| Subject category code |
TGP |
| Source |
thema |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
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| Classification number |
670 |
| Edition number |
23 |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Cheng, Jie. |
| Relator term |
author. |
| Relator code |
aut |
| -- |
http://id.loc.gov/vocabulary/relators/aut |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Research on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnect |
| Medium |
[electronic resource] / |
| Statement of responsibility, etc. |
by Jie Cheng. |
| 250 ## - EDITION STATEMENT |
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| Edition statement |
1st ed. 2018. |
| 264 #1 - |
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| -- |
Singapore : |
| -- |
Springer Singapore : |
| -- |
Imprint: Springer, |
| -- |
2018. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
XVIII, 137 p. 103 illus. |
| Other physical details |
online resource. |
| 336 ## - |
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| -- |
text |
| -- |
txt |
| -- |
rdacontent |
| 337 ## - |
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| -- |
computer |
| -- |
c |
| -- |
rdamedia |
| 338 ## - |
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| -- |
online resource |
| -- |
cr |
| -- |
rdacarrier |
| 347 ## - |
|---|
| -- |
text file |
| -- |
PDF |
| -- |
rda |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Springer Theses, Recognizing Outstanding Ph.D. Research, |
| International Standard Serial Number |
2190-5053 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Acceso multiusuario |
| 520 ## - SUMMARY, ETC. |
|---|
| Summary, etc. |
This thesis addresses selected unsolved problems in the chemical mechanical polishing process (CMP) for integrated circuits using ruthenium (Ru) as a novel barrier layer material. Pursuing a systematic approach to resolve the remaining critical issues in the CMP, it first investigates the tribocorrosion properties and the material removal mechanisms of copper (Cu) and Ru in KIO4-based slurry. The thesis subsequently studies Cu/Ru galvanic corrosion from a new micro and in-situ perspective, and on this basis, seeks ways to mitigate corrosion using different slurry additives. The findings presented here constitute a significant advance in fundamental and technical investigations into the CMP, while also laying the groundwork for future research. |
| 541 ## - IMMEDIATE SOURCE OF ACQUISITION NOTE |
|---|
| Owner |
UABC ; |
| Method of acquisition |
Temporal ; |
| Date of acquisition |
01/01/2021-12/31/2023. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Manufactures. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Tribology. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Corrosion and anti-corrosives. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Coatings. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Electronics. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Microelectronics. |
| 650 14 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Manufacturing, Machines, Tools, Processes. |
| -- |
https://scigraph.springernature.com/ontologies/product-market-codes/T22050 |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Tribology, Corrosion and Coatings. |
| -- |
https://scigraph.springernature.com/ontologies/product-market-codes/Z15000 |
| 650 24 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Término temático o nombre geográfico como elemento de entrada |
Electronics and Microelectronics, Instrumentation. |
| -- |
https://scigraph.springernature.com/ontologies/product-market-codes/T24027 |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
SpringerLink (Online service) |
| 773 0# - HOST ITEM ENTRY |
|---|
| Title |
Springer Nature eBook |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Printed edition: |
| International Standard Book Number |
9789811061646 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Printed edition: |
| International Standard Book Number |
9789811061660 |
| 776 08 - ADDITIONAL PHYSICAL FORM ENTRY |
|---|
| Relationship information |
Printed edition: |
| International Standard Book Number |
9789811355851 |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Springer Theses, Recognizing Outstanding Ph.D. Research, |
| -- |
2190-5053 |
| 856 40 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Public note |
Libro electrónico |
| Uniform Resource Identifier |
http://148.231.10.114:2048/login?url=https://doi.org/10.1007/978-981-10-6165-3 |
| 912 ## - |
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| -- |
ZDB-2-ENG |
| 912 ## - |
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| -- |
ZDB-2-SXE |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Koha item type |
Libro Electrónico |
